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Integrated Display Type Digital Flow Sensor FM-200

Dual color with sub display at a glance

CE Approved
CE : EMC Directive

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Easy-to-see dual color with sub display!

The setting conditions are displayed on the sub display, making it much easier to keep track of operations.
In addition, the digital display which switches between 2 colors lets you check the status of sensor operation at a glance.

Easy-to-see dual color with sub display!


High precision of ±3 % F.S.

A new rectification mechanism and Micro Electro Mechanical System (MEMS) technology allow the sensor to be mounted on a Si sensor chip (3 x 3.5 mm0.118 x 0.138 in). This provides an extremely small heat capacity, high precision of ±3 % F.S. and high-speed response. The two temperature sensors on each side of the heater detect the heat distribution to make bidirectional detection possible.


One sensor for both intake and exhaust

One sensor for both intake and exhaust

A single sensor can detect flows bidirectionally. In addition, it can be set to detect flows in either the forward or reverse direction only, making it suitable for a variety of applications.


No straight pipes needed

The rectification method used by the new mechanism makes straight pipes unnecessary at both the intake and exhaust sides.

No straight pipes needed



Quick connection is possible with a cover-attached connector.



Flexible installation direction

Other than the ability to carry out bidirectional detection, there are no limitations on the installation direction, making the installation very flexible.

Flexible installation direction


Equipped with a wide variety of functions for greater ease of use

  • Integrated value reset function
    During integrated mode, external input allows reset of the integrated value.
  • Analog voltage output
    1 to 5 V analog voltage output is incorporated.
  • Key lock function
    Key operation can be disabled to prevent mis-operation.
  • Rattle prevention function (Response time setting)
    The response time can be set to one of seven steps from 50 ms to approximately 1,500 ms. This prevents rattling from rapid changes in flow or from noise.
  • Display rate setting
    The display update period for the digital display can be changed to 250 ms, 500 ms or 1,000 ms in order to eliminate display flickering.
  • ECO mode
    After approx. one minute of no operation, sensor will be switched to ECO mode.
    Backlight will be turned off to reduce power consumption.



Suitable for cost and quality control! Integrated output mode incorporated

The FM-200 series can control and manage flows in a wide variety of output modes such as integrated output mode, depending on the required application.

Integrated output mode
■ Quality control

When the volume of flow of the gas being measured reaches the set integrated value, output switches to ON or OFF.
・Controls N2 charging volumes for electronic components
・Controls air blowing volumes, etc.

Quality control


Integrated pulse output mode
■ Cost management

The pulse output is generated once at every specified integrated value*. This lets you know the amount of air consumed per unit of time easily.

* Integrated values are specified by range and can vary. For details, refer to “SPECIFICATIONS”.

・Controls N2 purge volumes in reflow furnaces
・Controls overall volumes of air consumed by equipment, etc.

Cost management


■ Energy-saving and environmental-friendly
The pulse output from the flow sensor can be inputted to the pulse counter of an Eco-Power Meter so that air consumption and power consumption can both be measured simultaneously.

Energy-saving and environmental-friendly

1) Displayed value data is not outputted.
2) For details, refer to “KW8M Eco-Power Meter”.




  • Window comparator mode
    This mode is used for setting comparative output to ON or OFF at flow rates within the setting range.

Window comparator mode


  • Hysteresis mode
    This mode is used for setting comparative output hysteresis to the desired level and for carrying out ON / OFF control.

Hysteresis mode


  • Output OFF mode
    Comparative output is forcibly maintained at OFF regardless of the setting value.

Output OFF mode



Individual specifications

Type Resin body type
Model No. FM-252-4(-P) FM-213-4(-P) FM-253-4(-P) FM-214-4(-P) FM-254-8(-P) FM-215-8(-P)
Full scale flow rate
(Note 1)
500 mℓ/min. 1,000 mℓ/min. 5 ℓ/min. 10 ℓ/min. 50 ℓ/min. 100 ℓ/min.
Display range
(Note 2)
-550 to +550 mℓ/min. -1,100 to +1,100 mℓ/min. -5.5 to +5.5 ℓ/min. -11 to +11 ℓ/min. -55 to +55 ℓ/min. -110 to +110 ℓ/min.
Setting and display resolution 1 mℓ/min. 0.01 ℓ/min. 0.1 ℓ/min.
Display range
(Note 2)
±9999999 mℓ ±99999.99 ℓ ±999999.9 ℓ
Setting and display resolution 1 mℓ 0.01 ℓ 0.1 ℓ
Specified integrated value 5 mℓ 10 mℓ 0.05 ℓ 0.1 ℓ 0.5 ℓ 1 ℓ
Port size ø4 ø0.157 push-in ø8 ø0.315 push-in
Weight Net weight: 50 g approx., Gross weight: 115 g approx. Net weight: 70 g approx., Gross weight: 135 g approx.


Type Aluminum body type
Model No. FM-255-AR2(-P) FM-255-AG2-P FM-216-AR2(-P) FM-216-AG2-P
Full scale flow rate
(Note 1)
500 ℓ/min. 1,000 ℓ/min.
Display range
(Note 2)
-550 to +550 ℓ/min. -1,100 to +1,100 ℓ/min.
Setting and display resolution 1 ℓ/min.
Display range
(Note 2)
±9999999 ℓ
Setting and display resolution 1 ℓ
Specified integrated value 5 ℓ 10 ℓ
Port size Rc1/2 female thread G1/2 female thread Rc1/2 female thread G1/2 female thread
Weight Net weight: 155 g approx., Gross weight: 220 g approx.


Common specifications

Type NPN output type PNP output type
Model No. FM-2□ FM-2□-P
Rated pressure range -0.09 to +0.7 MPa
Pressure withstandability 1 MPa
Applicable fluid Clean air (Note 3), compressed air (Note 3), nitrogen gas
Supply voltage 12 to 24 V DC ± 10 % Ripple P-P10 % or less
Current consumption Normal mode: 60 mA or less, ECO mode: 40 mA or less
Comparative outputs
(Comparative output 1 /
Comparative output 2)
NPN open-collector transistor
・Maximum sink current: 50 mA or less
・Applied voltage: 26.4 V DC or less
(between comparative output and 0 V)
・Residual voltage: 2.4 V or less (at 50 mA sink current)
PNP open-collector transistor
・Maximum source current: 50 m A or less
・Applied voltage: 26.4 V DC or less
(between comparative output and +V)
・Residual voltage: 2.4 V or less (at 50 mA source current)
  Output modes Output OFF mode, window comparator mode, hysteresis mode, integrated output mode, integrated pulse output mode
Short-circuit protection Incorporated
Hysteresis Window comparator mode: 1 to 8 % F.S. approx. (variable) (Factory settings: approx. 1 % F.S.), Hysteresis mode: Variable (minimum 1 digit)
Response time 50 ms, 80 ms, 120 ms, 200 ms, 400 ms, 800 ms, 1,500 ms, selectable by key operation
Analog voltage output Output voltage: 1 to 5 V, Output impedance: 1 kΩ approx.
[Refer to “Analog voltage output” for more details.]
Repeatability Within ±1 % F.S.
Accuracy assurance
range (Note 4)
Bi-direction : -100 to -3 % F.S., +3 to +100 % F.S.
One-side direction : +3 to +100 % F.S.
External input ON voltage: 0 to +0.4 V
OFF voltage: +5 V to +V, or open
Input time: 80 ms or more
ON voltage: +5 V to +V
OFF voltage: 0 to +0.6 V, or open
Input time: 80 ms or more
Linearity Within ±3 % F.S. (Ambient temperature +25 ℃ +77 ℉, flow rate range 3 to 100 % F.S., atmospheric criteria on secondary side)
Display 4 digits + 4 digits 2-color LCD display (Display refresh rate: 250 ms, 500 ms, 1,000 ms, selectable by key operation)
Protection IP40 (IEC)
Ambient temperature 0 to +50 ℃ +32 to +122 ℉ (No dew condensation allowed),
Storage: -10 to +60 ℃ +14 to +140 ℉
Ambient humidity 35 to 90 % RH, Storage: 35 to 90 % RH
Voltage withstandability 1,000 V AC for one min. between all supply terminals connected together and enclosure (Excluding the aluminum body type)
Insulation resistance 10 MΩ, or more, with 500 V DC megger between all supply terminals connected together and enclosure (Excluding the aluminum body type)
Vibration resistance /
Shock resistance
10 to 150 Hz frequency, 0.75 mm 0.030 in amplitude or 49 m/s2 max. acceleration, in X, Y and Z directions for two hours each / 100 m/s2 acceleration (10 G approx.) in X, Y and Z directions for three times each
Temperature characteristics Within ±0.2 % F.S./℃ (+25 ℃ +77 ℉ criteria, +15 to +35 ℃ +59 to +95 ℉ ambient temperature range)
Pressure characteristics Within ±5 % F.S. (-0.09 to +0.7 MPa, +25 ℃ +77 ℉, atmospheric criteria on secondary side)
Enclosure earthing Floating (Note 5)
Material Enclosure: ABS, Body: Polyamide (Aluminum body type: Aluminum), Switch: EPDM, Display: Acrylic, Mounting screw part (Resin body type): Brass current plate / port filter: Stainless steel (used for the gas contact area), Sensor chip: Silicon, Gasket: Fluorine rubber
Connecting method Connector
Cable length Total length up to 10 m 32.808 ft is possible with 0.3 mm2, or more, cable.
Accessory CN-F15-C1 (Connector attached cable 1 m 3.281 ft): 1 pc.


Note 1 :Converted to volumetric flow at +20 ℃ +68 ℉ and 1 atmospheric pressure (101 kPa).

Note 2 :The display flow rate range is the case when setting to bi-direction at the flow direction setting. When the flow direction is set to one-side forward direction or one-side reverse direction, the negative side of the display flow rate range shows 10 % of the full-scale (F.S.).

Note 3 :The clean air complies with JIS B 8392-1.1.1 to 5.6.2, and the compressed air complies with JIS B 8392-1.1.1 to 1.6.2.

Note 4 :Take care that if fluid flows in the vicinity of zero-point which is out of the accuracy assurance range, the instant flow rate value may forcibly display “zero”, or the integrated flow display value may not be counted up, or the integrated pulse output may not be outputted.

Note 5 :As a varistor (clamping voltage: approx. 40 V) is connected to the aluminum body type, do not apply voltage higher than the rated voltage of the sensor.